Piezoelectric crystal growth furnace technical parameter
Furnace cavity size: φ800mm×1000mm
Dimensions: 1000mm × 1000mm × 2500mm
Maximum crystal size: 6 inches
Seed crystal shaft pulling stroke: 450mm
Minimum line speed for lifting movement: 0.01mm/hr
Quick lifting speed: 200mm/min
Seed crystal axis rotation speed: 0.1 ~ 100r / min
Weighing system: weighing sensor range 20kg; signal amplifier display accuracy 0.01g
Control software: Lifting equal-diameter control software, using upper weighing method to control crystal diameter, crystal shape can be freely designed, PID and motion parameters can change with crystal shape transition, and data cross-display on screen provides comprehensive analysis of data during growth process tool.
Heating power supply: medium frequency induction heating
Heating maximum output power: 30KW
Vacuum system: mechanical pump vacuum
Water cooling system: furnace chamber, heating coil flow control cycle cooling.